Sputtering yield measurements during low energy xenon plasma bombardment

被引：0
|
作者：
Doerner, R.P. [1 ]
Whyte, D.G. [2 ]
Goebel, D.M. [3 ]
机构：
[1] Center for Energy Research, Univ. of California at San Diego, San Diego, CA 92093, United States
[2] University of Wisconsin-Madison, Madison, WI 53706, United States
[3] Boeing Space and Communications, Torrance, CA 90505, United States
来源：
Journal of Applied Physics | 2003年 / 93卷 / 09期
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学科分类号：
摘要：
21
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页码：5816 / 5823
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