Sputtering yield measurements during low energy xenon plasma bombardment

被引：0

作者：

Doerner, R.P. ^{[1
]}

Whyte, D.G. ^{[2
]}

Goebel, D.M. ^{[3
]}

机构：

[1] Center for Energy Research, Univ. of California at San Diego, San Diego, CA 92093, United States

[2] University of Wisconsin-Madison, Madison, WI 53706, United States

[3] Boeing Space and Communications, Torrance, CA 90505, United States

来源：

Journal of Applied Physics | 2003年 / 93卷 / 09期

关键词：

D O I：

暂无

中图分类号：

学科分类号：

摘要：

引用

页码：5816 / 5823

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