Diagnostic technique for diamond thin film quality using infrared transmission spectroscopy

被引:0
作者
Zhengzhou Univ, Zhengzhou, China [1 ]
机构
来源
Guangxue Xuebao/Acta Optica Sinica | 1997年 / 17卷 / 11期
关键词
D O I
暂无
中图分类号
学科分类号
摘要
引用
收藏
页码:1497 / 1502
相关论文
共 50 条
[21]   Monitoring dielectric thin-film production on product wafers using infrared emission spectroscopy [J].
Niemczyk, TM ;
Zhang, SB ;
Haaland, DM .
APPLIED SPECTROSCOPY, 2001, 55 (08) :1053-1059
[22]   Quantitative determination of borophosphosilicate glass thin-film properties using infrared emission spectroscopy [J].
Niemczyk, TM ;
Zhang, SB ;
Franke, JE ;
Haaland, DM .
APPLIED SPECTROSCOPY, 1999, 53 (07) :822-828
[23]   Effect of oxide layer on diamond (100) on the quality of vapour phase epitaxial diamond thin film [J].
Amornkitbamrung, V .
NEW DIAMOND AND FRONTIER CARBON TECHNOLOGY, 1999, 9 (04) :243-257
[24]   Effect of Oxide Layer on Diamond (100) on the Quality of Vapour Phase Epitaxial Diamond Thin Film [J].
Amornkitbamrung, Vittaya .
New Diamond and Frontier Carbon Technology, 9 (04) :243-257
[25]   CHEMOMETRICS AND INFRARED-SPECTROSCOPY FOR THE ANALYSIS OF THIN-FILM DIELECTRICS [J].
HAALAND, DM ;
WANGMANEERAT, B ;
NIEMCZYK, TM .
ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 1992, 203 :92-ANYL
[26]   INFRARED SPECTROSCOPY OF THIN-FILM STRUCTURES ON METALLIC BASE LAYERS [J].
KARPINOS, DM ;
LISTOVNI.SP .
ZHURNAL FIZICHESKOI KHIMII, 1973, 47 (06) :1604-1605
[27]   Far-infrared spectroscopy of a SrTiO3 thin film [J].
Fedorov, I. ;
Zelezny, V. ;
Petzelt, J. ;
Trepakov, V. ;
Jelinek, M. ;
Trtik, V. ;
Cernansky, M. ;
Studnicka, V. .
Ferroelectrics, 1998, 208 /209 (1 /4,1/2) :413-427
[28]   Far-infrared spectroscopy of a SrTiO3 thin film [J].
Fedorov, I ;
Zelezny, V ;
Petzelt, J ;
Trepakov, V ;
Jelinek, M ;
Trtik, V ;
Cernansky, M ;
Studnicka, V .
FERROELECTRICS, 1998, 208 (1-4) :413-427
[29]   NANOCRYSTALLINE DIAMOND THIN-FILM CHARACTERIZATION USING SOFT-X-RAY ABSORPTION-SPECTROSCOPY [J].
CARLISLE, JA ;
SUTHERLAND, DGS ;
JIMENEZ, I ;
TERMINELLO, LJ ;
GRUEN, DM ;
KRAUSS, AR ;
ZUIKER, C .
ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 1995, 210 :54-NUCL
[30]   Infrared ultrafast spectroscopy of solution-grown thin film tellurium [J].
Iyer, Vasudevan ;
Segovia, Mauricio ;
Wang, Yixiu ;
Wu, Wenzhuo ;
Ye, Peide ;
Xu, Xianfan .
PHYSICAL REVIEW B, 2019, 100 (07)