Ultrasonic actuator with multi-degree of freedom using bending and longitudinal vibrations of a single stator

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作者：
Amano, Takafumi [1 ]
Ishii, Takaaki [1 ]
Nakamura, Kentaro [1 ]
Ueha, Sadayuki [1 ]
机构：
[1] Tokyo Inst of Technology, Kanagawa, Japan
来源：
Proceedings of the IEEE Ultrasonics Symposium | 1998年 / 1卷
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页码：667 / 670
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