Fluorine-contained films with high water-repellency and transparency prepared by RF plasma-enhanced CVD

被引：0
|
作者：
Hozumi, A. [1 ]
Kakinoki, N. [1 ]
Asai, Y. [1 ]
Takai, O. [1 ]
机构：
[1] Nagoya Univ, Nagoya, Japan
来源：
| 1996年 / Chapman & Hall Ltd, London, United Kingdom卷 / 15期
关键词：
Angle measurement - Chemical vapor deposition - Contact angle - Fluorine containing polymers - Fourier transform infrared spectroscopy - Optical properties - Optical variables measurement - Plasma applications - Silanes - Substrates - Transparency - X ray photoelectron spectroscopy;
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摘要：
This paper prepares highly water-repellant and transparent fluorine-containing films on various substrates, such polycarbonatae, Si and glass, by RF plasma-enhanced CVD using FAS as a raw material. The water repellency of prepared films is evaluated by measuring contact angles of water drops. The contact angle of a water drop on the substrate is measured using a contact-anglemeter at 25°C in air. The chemical states of the films are studied using X-ray photoelectron spectroscopy and Fourier transform infrared spectroscopy. The optical properties are measured using an ellipsometer and a double-beam spectrometer.
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