Divided-area parallel process in large size RPM

被引：0
|
作者：
Wang, Feng
Yan, Yongnian
Yan, Xuri
机构：
来源：
Zhongguo Jixie Gongcheng/China Mechanical Engineering | 2000年 / 11卷 / 04期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：456 / 457
相关论文
共 50 条
  • [31] New process monitoring strategies for large area panel processing
    Cottet, D
    Scheffler, M
    Tröster, G
    2000 INTERNATIONAL SYMPOSIUM ON MICROELECTRONICS, 2000, 4339 : 166 - 171
  • [32] Sequential lateral solidification (SLS) process for large area AMOLED
    Choi, Jae Beom
    Chang, Young-Jin
    Park, Cheol-Ho
    Kim, Young-il
    Eom, JiHye
    Na, Hyung Don
    Chung, In-Do
    Jin, Seong Hyun
    Song, Young-Rok
    Choi, Beomrak
    Kim, Hyo Seok
    Park, Kyongtae
    Kim, Chi-Woo
    Souk, JunHyung
    Kim, Yangsun
    Jung, Baehyun
    Park, KeeChan
    2008 SID INTERNATIONAL SYMPOSIUM, DIGEST OF TECHNICAL PAPERS, VOL XXXIX, BOOKS I-III, 2008, 39 : 97 - +
  • [33] Film coating - Large area encapsulation process for electronics packaging
    Becker, K. -F.
    Braun, T.
    Koch, M.
    Bader, V.
    Aschenbrenner, R.
    Reichl, H.
    Polytronic 2005, Proceedings, 2005, : 30 - 33
  • [34] Large area ashing process using an atmospheric pressure plasma
    Yoo, Seungryul
    Lho, Taihyeop
    Seok, Dong Chan
    Hong, Yong Cheol
    Lee, Bongju
    THIN SOLID FILMS, 2011, 519 (20) : 6746 - 6749
  • [35] Fabrication of large area diffraction grating using LIGA process
    Daiji Noda
    Makoto Tanaka
    Kazuma Shimada
    Wataru Yashiro
    Atsushi Momose
    Tadashi Hattori
    Microsystem Technologies, 2008, 14 : 1311 - 1315
  • [36] Fabrication of large area diffraction grating using LIGA process
    Noda, Daiji
    Tanaka, Makoto
    Shimada, Kazuma
    Yashiro, Wataru
    Momose, Atsushi
    Hattori, Tadashi
    MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2008, 14 (9-11): : 1311 - 1315
  • [37] Size effects of area extreme pressure for large-scale cladding
    Li, Danyu
    Liu, Bin
    Zhou, Xiang
    Wang, Zhigang
    STRUCTURES, 2021, 29 : 408 - 415
  • [38] Macroscopic Assembly of Indefinitely Long and Parallel Nanowires into Large Area Photodetection Circuitry
    Ozgur, Erol
    Aktas, Ozan
    Kanik, Mehmet
    Yaman, Mecit
    Bayindir, Mehmet
    NANO LETTERS, 2012, 12 (05) : 2483 - 2487
  • [39] LARGE AREA PARALLEL SURFACE NANOSTRUCTURING WITH LASER IRRADIATION THROUGH MICROLENS ARRAYS
    Lim, C. S.
    Hong, M. H.
    Lin, Y.
    Tan, L. S.
    Kumar, A. Senthil
    Rahman, M.
    SURFACE REVIEW AND LETTERS, 2010, 17 (03) : 383 - 387
  • [40] Large area single photon detectors based on parallel configuration NbN nanowires
    Mattioli, Francesco
    Ejrnaes, Mikkel
    Gaggero, Alessandro
    Casaburi, Alessandro
    Cristiano, Roberto
    Pagano, Sergio
    Leoni, Roberto
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2012, 30 (03):
12345