FLUORINE DEPTH ANALYSIS USING RUTHERFORD BACKSCATTERING.

被引：0

作者：

Khubeis, I.G. ^{[1
]}

Ziegler, J.F. ^{[1
]}

机构：

[1] Univ of Jordan, Amman, Jordan, Univ of Jordan, Amman, Jordan

来源：

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms | 1986年 / B24-25卷 / pt 2 Apr III期

关键词：

SPECTROSCOPY - SPECTRUM ANALYSIS;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

Rutherford backscattering (RBS) of helium ions seems to be a feasible method for the depth analysis of fluorine. Targets of thickness between 30 and 3B24/250 A of calcium fluoride and magnesium fluoride were bombarded with 2. 3 MeV alpha particles. The number of atoms of fluorine per cm**2 as a function of the thickness of the targets and the target substrates were measured. The effect of substrate material on the measured number of atoms/cm**2 of fluorine is negligible.

引用

页码：682 / 687