AUTOMATING THE INSPECTION PROCESS FOR RETICLES, MASKS AND WAFERS.

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作者：
Awamura, Daikichi
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来源：
JEE, Journal of Electronic Engineering | 1983年 / 20卷 / 201期
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摘要：
In LSI manufacturing processes, there are three kinds of objects that undergo optical inspections. They are reticles, photo masks and wafers. Efforts are being made to develop automatic inspection equipment for wafers based on similar methods. As an example, automatic optical inspection equipment for wafers is discussed in this article.
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页码：64 / 68
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