Study on synchrotron radiation soft X-ray lithography technology

被引：0
|
作者：
Sun, Baoyin [1 ]
Chen, Mengzhen [1 ]
机构：
[1] Microelectronics Research and, Development Cent, Academia Sinica, Beijing, China
来源：
Weixi Jiagong Jishu/Microfabrication Technology | 1993年 / 04期
关键词：
Soft X ray lithography;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
(Edited Abstract)
引用
收藏
页码：23 / 28
相关论文
共 50 条
  • [41] SOFT X-RAY MONOCHROMATOR FOR THE MAX SYNCHROTRON RADIATION FACILITY.
    Nyholm, Ralf
    Svensson, Svante
    Nordgren, Joseph
    Flodstrom, Anders
    Nuclear instruments and methods in physics research, 1985, A246 (1-3): : 267 - 271
  • [42] Multilayer polarizing elements for synchrotron radiation soft X-ray region
    Zhu, J
    Cui, MQ
    Zheng, L
    Zhao, YD
    Wang, ZS
    HIGH ENERGY PHYSICS AND NUCLEAR PHYSICS-CHINESE EDITION, 2004, 28 (08): : 893 - 897
  • [43] Multilayer polarizing elements for synchrotron radiation soft X-ray region
    Zhu, Jie
    Cui, Ming-Qi
    Zheng, Lei
    Zhao, Yi-Dong
    Wang, Zhan-Shan
    Kao Neng Wu Li Yu Ho Wu Li/High Energy Physics and Nuclear Physics, 2004, 28 (08):
  • [44] Imaging soft X-ray microscope at Rits Synchrotron Radiation Center
    Hirai, A
    Takemoto, K
    Nishino, K
    Watanabe, N
    Anderson, E
    Attwood, D
    Kern, D
    Hettwer, M
    Rudolph, D
    Aoki, S
    Nakayama, Y
    Kihara, H
    JOURNAL OF SYNCHROTRON RADIATION, 1998, 5 : 1102 - 1104
  • [45] Imaging soft X-ray microscope at Rits Synchrotron Radiation Center
    Hirai, A.
    Takemoto, K.
    Nishino, K.
    Watanabe, N.
    Anderson, E.
    Attwood, D.
    Kern, D.
    Hettwer, M.
    Rudolph, D.
    Aoki, S.
    Nakayama, Y.
    Kihara, H.
    Journal of Synchrotron Radiation, 1998, 5 (03): : 1102 - 1104
  • [46] Soft x-ray emission excited resonantly and nonresonantly by synchrotron radiation
    Ederer, DL
    Carlisle, JA
    Jimenez, J
    Jia, JJ
    Zhou, L
    Callcott, TA
    Perera, RCC
    Moewes, A
    Terminello, LJ
    Shirley, E
    Asfaw, A
    vanEk, J
    Morikawa, E
    Himpsel, FJ
    X-RAY AND INNER-SHELL PROCESSES - 17TH INTERNATIONAL CONFERENCE, 1997, (389): : 749 - 770
  • [47] An analytical model for the polarization of synchrotron radiation in a soft X-ray region
    Xi Shi-Bo
    Cui Ming-Qi
    Zhu Jing-Tao
    Yang Dong-Liang
    Xu Wei
    Liu Li-Juan
    Guo Zhi-Ying
    Zhao Jia
    CHINESE PHYSICS C, 2013, 37 (03)
  • [48] Evaluation of soft x-ray multilayer optics using synchrotron radiation
    Hatano, Tadashi
    Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering, 2014, 80 (06): : 524 - 527
  • [49] Application of Synchrotron Radiation X-ray Scattering and Spectroscopy to Soft Matter
    Takahara, Atsushi
    Higaki, Yuji
    Hirai, Tomoyasu
    Ishige, Ryohei
    POLYMERS, 2020, 12 (07)
  • [50] A NEW MOUNTING OF SOFT X-RAY MONOCHROMATOR FOR SYNCHROTRON ORBITAL RADIATION
    MIYAKE, KP
    KATO, R
    YAMASHITA, H
    SCIENCE OF LIGHT, 1969, 18 (01): : 39 - +
12345