Synthesis of Uniform and Large-Area Polycrystalline Diamond Films Using Microwave Plasma Chemical Vapor Deposition System

被引：0
作者：
Department of Electronic Engineering, Natl. YunLin Univ. Sci. and Technol., TouLiu, Yunlin, 640, Taiwan [1 ]
机构：
来源：
New Diamond Front. Carbon Technol. | / 4卷 / 259-272期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
相关论文
共 50 条
[41]   Synthesis of diamond hexagonal nanoplatelets by microwave plasma chemical vapor deposition [J].
Lu, CA ;
Chang, L .
DIAMOND AND RELATED MATERIALS, 2004, 13 (11-12) :2056-2062
[42]   Polycrystalline SiC thin films prepared by microwave plasma chemical vapor deposition [J].
Yonekubo, S ;
Kamimura, K ;
Onuma, Y .
SILICON CARBIDE AND RELATED MATERIALS 1995, 1996, 142 :233-236
[43]   A review of large-area bilayer graphene synthesis by chemical vapor deposition [J].
Fang, Wenjing ;
Hsu, Allen L. ;
Song, Yi ;
Kong, Jing .
NANOSCALE, 2015, 7 (48) :20335-20351
[44]   Synthesis of large-area graphene on molybdenum foils by chemical vapor deposition [J].
Wu, Yuanwen ;
Yu, Guanghui ;
Wang, Haomin ;
Wang, Bin ;
Chen, Zhiying ;
Zhang, Yanhui ;
Wang, Bin ;
Shi, Xiaoping ;
Xie, Xiaoming ;
Jin, Zhi ;
Liu, Xinyu .
CARBON, 2012, 50 (14) :5226-5231
[45]   Plasma chemical vapor deposition of diamond films [J].
Bachmann, PK .
PHYSICS OF DIAMOND, 1997, 135 :45-71
[46]   Large Area Single-Crystal Diamond Synthesis by 915 MHz Microwave Plasma-Assisted Chemical Vapor Deposition [J].
Liang, Qi ;
Yan, Chih-shiue ;
Lai, Joseph ;
Meng, Yu-fei ;
Krasnicki, Szczesny ;
Shu, Haiyun ;
Mao, Ho-kwang ;
Hemley, Russell J. .
CRYSTAL GROWTH & DESIGN, 2014, 14 (07) :3234-3238
[47]   Synthesis of large area graphene films by chemical vapor deposition [J].
Kawamoto, Nicole N. ;
Luo, Zhengtang ;
Kaplan, Michael ;
Johnson, Charlie .
ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 2011, 241
[48]   Growth of diamond films with bias during microwave plasma chemical vapor deposition [J].
Lu, CA ;
Chang, L ;
Huang, BR .
DIAMOND AND RELATED MATERIALS, 2002, 11 (3-6) :523-526
[49]   The effect of the substrate position on microwave plasma chemical vapor deposition of diamond films [J].
Lin, CR ;
Su, CH ;
Hung, CH ;
Chang, C ;
Yan, SH .
SURFACE & COATINGS TECHNOLOGY, 2006, 200 (10) :3156-3159
[50]   Growth of diamond thin films by microwave plasma chemical vapor deposition process [J].
Barshilia, HC ;
Mehta, BR ;
Vankar, VD .
JOURNAL OF MATERIALS RESEARCH, 1996, 11 (04) :1019-1024
12345