Synthesis of Uniform and Large-Area Polycrystalline Diamond Films Using Microwave Plasma Chemical Vapor Deposition System

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Department of Electronic Engineering, Natl. YunLin Univ. Sci. and Technol., TouLiu, Yunlin, 640, Taiwan [1 ]
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New Diamond Front. Carbon Technol. | / 4卷 / 259-272期
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