Effects of magnetic field gradient on crystallographic properties in tin-doped indium oxide films deposited by electron cyclotron resonance plasma sputtering

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[1] Kubota, Eishi
[2] Shigesato, Yuzo
[3] Igarashi, Masaru
[4] Haranou, Takeshi
[5] Suzuki, Kohichi
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Kubota, Eishi | 1600年 / 33期
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