Axial microscopic distribution of grown-in defects in Czochralski-grown silicon crystals

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[1] Umeno, Shigeru
[2] Sadamitsu, Shinsuke
[3] Murakami, Hiroki
[4] Hourai, Masataka
[5] Sumita, Shigeo
[6] Shigematsu, Tatsuhiko
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Umeno, Shigeru | 1600年 / 32期
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