A compact Schwarzschild soft X-ray microscope with a laser-produced plasma source

被引:0
作者
Horikawa, Y. [1 ]
Nagai, K. [1 ]
Mochimaru, S. [1 ]
Iketaki, Y. [1 ]
机构
[1] T. Morokuma Research Laboratory, Olympus Optical Co. Ltd., 2-3 Kuboyama-cho, Hachioji-shi, Tokyo 192, Japan
关键词
Electron sources - Gravitation - Laser mirrors - Laser produced plasmas - Multilayers;
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摘要
A compact Schwarzschild soft X-ray microscope using a laser-produced plasma soft X-ray source has been developed. The laser-produced plasma source, which is small but of high brilliance, has made it posible to use the soft X-ray microscope in a small laboratory. The microscope is composed of a Schwarzschild objective and a grazing incidence mirror condenser. Image contrast for biological specimens in soft X-ray regions is investigated briefly. It is possible to observe the fine structures of a thin specimen at a wavelength of 15 nm; at this wavelength high-contrast images of biological specimens have been obtained with a single laser shot of pulse width of 8 ns at a resolution of 0.3 μm. The resolution of the system is limited by the detector.
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页码:189 / 194
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