Using simulation to improve semiconductor manufacturing

被引：0

作者：

Potti, Kishore ^{[1
]}

Mason, Scott J. ^{[1
]}

机构：

[1] Advanced Micro Devices, Austin, United States

来源：

Semiconductor International | 1997年 / 20卷 / 08期

关键词：

Computer simulation - Etching - Maintenance - Microelectronic processing - Process engineering - Silicon wafers;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

The simulation program chosen for Advanced Micro Devices' wafer fab was ManSim/X, designed for semiconductor manufacturers by Tyecin Systems. The simulation model of all process flows in an existing Advanced Micro Devices fab identifies and predicts throughput-limiting bottlenecks and can determine the number of tools required for a given product mix or wafer starts plan. Several case studies illustrate the use of simulation in work-in-process management, capacity analysis, total preventive maintenance and operations analysis. The complexity of semiconductor manufacturing makes simulation method of choice for predicting the results of proposed tool moves, shutdowns and/or purchases.

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