Using simulation to improve semiconductor manufacturing

被引：0
|
作者：
Potti, Kishore [1 ]
Mason, Scott J. [1 ]
机构：
[1] Advanced Micro Devices, Austin, United States
来源：
Semiconductor International | 1997年 / 20卷 / 08期
关键词：
Computer simulation - Etching - Maintenance - Microelectronic processing - Process engineering - Silicon wafers;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
The simulation program chosen for Advanced Micro Devices' wafer fab was ManSim/X, designed for semiconductor manufacturers by Tyecin Systems. The simulation model of all process flows in an existing Advanced Micro Devices fab identifies and predicts throughput-limiting bottlenecks and can determine the number of tools required for a given product mix or wafer starts plan. Several case studies illustrate the use of simulation in work-in-process management, capacity analysis, total preventive maintenance and operations analysis. The complexity of semiconductor manufacturing makes simulation method of choice for predicting the results of proposed tool moves, shutdowns and/or purchases.
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