Novel displacement measuring system using reflecting grating

被引:0
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作者
Wu, Yuting [1 ]
Hu, Yuxi [1 ]
机构
[1] Univ of Science & Technology of, China, Hefei, China
来源
关键词
Laser applications - Position measurement - Reflection - Reflectometers - Semiconductor lasers;
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学科分类号
摘要
The principle and characteristics of such a system were introduced which consists of diode laser focusing lens, reflecting main scale grating, and quarternary index scale grating photosensor. The special optics and novel configuration make it a feature of double-frequency function and make the moire fringe modulation signal insensitive to the gap between the main grating and index grating. The theoretical analysis and experimental results were presented in this paper also.
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页码:51 / 55
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