Novel displacement measuring system using reflecting grating

被引：0
|
作者：
Wu, Yuting [1 ]
Hu, Yuxi [1 ]
机构：
[1] Univ of Science & Technology of, China, Hefei, China
来源：
Guangdian Gongcheng/Opto-Electronic Engineering | 1993年 / 20卷 / 04期
关键词：
Laser applications - Position measurement - Reflection - Reflectometers - Semiconductor lasers;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
The principle and characteristics of such a system were introduced which consists of diode laser focusing lens, reflecting main scale grating, and quarternary index scale grating photosensor. The special optics and novel configuration make it a feature of double-frequency function and make the moire fringe modulation signal insensitive to the gap between the main grating and index grating. The theoretical analysis and experimental results were presented in this paper also.
引用
收藏
页码：51 / 55
相关论文
共 50 条
  • [1] Intelligent grating displacement measuring system
    Yu Jun
    Lin Xiaojing
    Sun Lumei
    Zhu Jianjun
    ISTM/2007: 7TH INTERNATIONAL SYMPOSIUM ON TEST AND MEASUREMENT, VOLS 1-7, CONFERENCE PROCEEDINGS, 2007, : 4369 - 4371
  • [2] A displacement measuring system based on grating double diffraction
    Zhao, Bo
    Wang, Lei
    Xu, Mi-er
    Zhao, Hong
    Liu, Xiang-dong
    NINTH INTERNATIONAL SYMPOSIUM ON PRECISION ENGINEERING MEASUREMENTS AND INSTRUMENTATION, 2015, 9446
  • [3] Research Of Displacement Measuring System Based On Capacitive Grating Sensor
    Yu Guangping
    Wang Shanhui
    Zhou Yinggang
    INFORMATION TECHNOLOGY FOR MANUFACTURING SYSTEMS, PTS 1 AND 2, 2010, : 1260 - 1264
  • [4] Displacement measuring grating interferometer: a review
    Peng-cheng Hu
    Di Chang
    Jiu-bin Tan
    Rui-tao Yang
    Hong-xing Yang
    Hai-jin Fu
    Frontiers of Information Technology & Electronic Engineering, 2019, 20 : 631 - 654
  • [5] Displacement measuring grating interferometer: a review
    Hu, Peng-cheng
    Chang, Di
    Tan, Jiu-bin
    Yang, Rui-tao
    Yang, Hong-xing
    Fu, Hai-jin
    FRONTIERS OF INFORMATION TECHNOLOGY & ELECTRONIC ENGINEERING, 2019, 20 (05) : 631 - 654
  • [6] Precise displacement-measuring system with laser holographic optical grating
    Huazhong Univ of Technology, Wuhan, China
    Jiguang Yu Hongwai, 1 (23-24, 29):
  • [7] Development of symmetrical double-grating interferometric displacement measuring system
    Gao J.
    Zong M.
    Zong, Mingcheng (zongmingcheng@ime.ac.cn), 1600, Science Press (43):
  • [8] Design of a miniature single-grating displacement measuring system with nanometer resolution
    Yang, Dongxing
    Yan, Shuhua
    Du, Liebo
    Wang, Guochao
    Lin, Cunbao
    Zou, Pengfei
    Hongwai yu Jiguang Gongcheng/Infrared and Laser Engineering, 2013, 42 (04): : 1020 - 1025
  • [9] Study on a New Method for Improving Resolution of Grating Interferometer Displacement Measuring System
    Shi, Lun
    Wang, He
    Wang, Chi-Ping
    Chen, Jia-Bao
    2015 3RD INTERNATIONAL CONFERENCE ON CONTROL, MECHATRONICS AND AUTOMATION (ICCMA 2015), 2016, 42
  • [10] Novel CCD in-plane displacement measuring system
    Wang, YT
    Zhao, SQ
    Meng, Z
    Sui, HL
    PROCEEDINGS OF THE SECOND INTERNATIONAL SYMPOSIUM ON INSTRUMENTATION SCIENCE AND TECHNOLOGY, VOL 2, 2002, : 361 - 365
12345