Composition control of lead zirconate titanate thin films in electron cyclotron resonance plasma enhanced chemical vapor deposition system

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作者：
Kim, Jae-Whan [1 ]
Shin, Joong-Shik [1 ]
Wee, Dang-Moon [1 ]
No, Kwangsoo [1 ]
Lee, Won-Jong [1 ]
机构：
[1] KAIST, Taejon, Korea, Republic of
来源：
| 1996年 / JJAP, Minato-ku, Japan卷 / 35期
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