Flatness change of vacuum chuck for ultra-precision machining due to thermal deformation (1st report) - thermal behavior of vacuum chuck

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Yokoyama, Kazuhiro

Yamada, Kazutaka

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Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering | 1998年 / 64卷 / 08期

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页码：1201 / 1205

共 12 条

[1] Flatness change of vacuum-chuck for ultra-precision machining due to thermal deformation (2nd Report) - experimental study on mechanism of flatness change
Yokoyama, Kazuhiro
Yamada, Kazutaka
Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering, 1998, 64 (10): : 1472 - 1476
[2] Clamping characteristics of pin-type vacuum chuck (1st Report) - influence of back-surface waviness on wafer flatness
Une, Atsunobu
Tsushima, Yoshio
Mochida, Masaaki
Matsui, Shinsuke
Ishikawa, Yoshimasa
Ohira, Fumikazu
Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering, 1998, 64 (10): : 1517 - 1521
[3] Study on measurement of axisymmetrical form generated by ultra-precision machining (1st report) - principle and simulation of measurement
Itoh, Shyunji
Yamamoto, Masaharu
Narikiyo, Tatsuo
Horiuchi, Osamu
Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering, 1994, 60 (06): : 867 - 871
[4] Development of a freezing pin chuck for polishing (1st report) - Tensile and shear stress during polishing and deformation of a large warpage wafer caused by solidification - Tensile a
Yoshitomi, Kenichiro
Takehana, Katsunori
Une, Atsunobu
Ogasawara, Nagahisa
Mochida, Masaaki
1600, Japan Society for Precision Engineering (80): : 950 - 955
[5] Finite element analysis of thermal behaviour in metal machining - 1st report, influence of thermophysical properties on cutting temperature
Maekawa, K
Nakano, Y
Kitagawa, T
JSME INTERNATIONAL JOURNAL SERIES C-MECHANICAL SYSTEMS MACHINE ELEMENTS AND MANUFACTURING, 1996, 39 (04): : 857 - 863
[6] EVALUATION OF THE THERMAL-HYDRAULIC AND FUEL-ROD THERMAL AND MECHANICAL DEFORMATION-BEHAVIOR DURING THE 1ST POWER BURST FACILITY NUCLEAR BLOWDOWN TESTS
MACDONALD, PE
BROUGHTON, JM
SPORE, JW
NUCLEAR TECHNOLOGY, 1979, 44 (03) : 401 - 410
[7] Flow and temperature due to thermal cylinders occurring in Buoyant flow in stably stratified air (1st report, temperature characteristics)
Noto, Katsuhisa
Mitsuhashi, Satoshi
Nakajima, Tsuyoshi
Noto, K. (noto@mech.kobe-u.ac.jp), 1600, Japan Society of Mechanical Engineers (68): : 2340 - 2347
[8] SURFACE MODIFICATION OF 1ST WALL MATERIAL DUE TO ION-IMPLANTATION AND THERMAL ANNEALING AND ITS EFFECT ON HYDROGEN PERMEATION BEHAVIOR
YAMAWAKI, M
NAMBA, T
YAMAGUCHI, K
KIYOSHI, T
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1987, 23 (04): : 498 - 504
[9] Super-resolution optical measurement for ultra-precision machined surface defects by using structured light illumination shift (1st report) - Theoretical verification of resolution property-
Seimitsu Kogaku Kaishi, 2008, 5 (498-503):
[10] Monitoring of tool wear of single crystal diamond tool in ultra-precision cutting of aluminum alloy (1st Report) - Consideration of effective parameters in indirect method for monitoring of tool wear
Iwamoto, Ryuichi
Kondo, Eiji
Yoshidome, Suguya
Ichiki, Koichi
Kawagoishi, Norio
Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering, 2009, 75 (06): : 757 - 761

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