Formation of LaSi2-x layers on Si by high-current La ion implantation

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[1] Tang, Xiao Jia
[2] Cheng, Xiang Qian
[3] Wang, Run Shun
[4] Liu, Bai Xin
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Tang, X.J. (dmslbx@tsinghua.edu.cn) | 1600年 / Japan Society of Applied Physics卷 / 42期
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