A time-resolved Langmuir double-probe method for the investigation of pulsed magnetron discharges

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[1] Welzel, Th.
[2] Dunger, Th.
[3] Kupfer, H.
[4] Richter, F.
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Welzel, Th. (t.welzel@physik.tu-chemnitz.de) | 1600年 / American Institute of Physics Inc.卷 / 96期
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