COMPUTER-AIDED PROCESSING SYSTEM (CAPS) FOR VLSI DEVELOPMENT.

被引：0

作者：

Kotani, Norihiko ^{[1
]}

Yamano, Tsuyoshi ^{[1
]}

Tateishi, Junji ^{[1
]}

Akasaka, Yoichi ^{[1
]}

Kawazu, Satoru ^{[1
]}

机构：

[1] Mitsubishi Electric Corp, Itami, Jpn, Mitsubishi Electric Corp, Itami, Jpn

来源：

Electronics and Communications in Japan, Part II: Electronics (English translation of Denshi Tsushin Gakkai Ronbunshi) | 1988年 / 71卷 / 05期

关键词：

COMPUTERS; PERSONAL - PROCESS CONTROL - Computer Applications;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

In this paper, a distributed wafer tracking system for VLSI development is described. This distributed computer system is constituted of personal computers and a host computer. A new method was developed and adopted in which the process specifications are pre-registered on 3. 5 inch floppy discs as well as a new data management architecture. This system realizes higher reliability and flexibility using simple hard/software construction and flexibility than the conventional centralized system.

引用

页码：13 / 23