INTERNAL CLEANING METHOD FOR BROAD BEAM ION SOURCES.

被引：0
作者：
Anon
机构：
来源：
IBM technical disclosure bulletin | 1985年 / 27卷 / 11期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：6751 / 6752
相关论文
共 50 条
  • [41] TECHNOLOGY AND APPLICATIONS OF BROAD-BEAM ION SOURCES USED IN SPUTTERING .1. ION-SOURCE TECHNOLOGY
    KAUFMAN, HR
    CUOMO, JJ
    HARPER, JME
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1982, 21 (03): : 725 - 736
  • [42] MULTIPLE BEAM AND WIDE BEAM ION SOURCES
    FITCH, RK
    RUSHTON, GJ
    OSHEA, KR
    JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1972, 5 (07): : 622 - &
  • [43] Sources of beam halo formation in heavy-ion superconducting linac and development of halo cleaning methods
    Ostroumov, PN
    BEAM HALO DYNAMICS, DIAGNOSTICS, AND COLLIMATION, 2003, 693 : 53 - 56
  • [44] Mutual coupling between active printed sources. Analysis of a two dimensional finite array of active radiating sources. Application to electronic scanned beam
    Couplages entre sources imprimees actives. Analyse d'un reseau fini a deux dimensions de sources plates actives. Application au balayage electronique
    Dubost, Gerard, 1600, (48): : 9 - 10
  • [45] Metal Ion Sources for Ion Beam Implantation
    Zhao, W. J.
    Zhao, Z. Q.
    Ren, X. T.
    ION IMPLANTATION TECHNOLOGY 2008, 2008, 1066 : 344 - +
  • [46] FINANCING A RESEARCH-DEVELOPMENT ACTIVITY THROUGH INTERNAL SOURCES. A COMPARATIVE STUDY
    Rus, Mircea-Iosif
    METALURGIA INTERNATIONAL, 2012, 17 (12): : 235 - 237
  • [47] HIGH-SPEED FUSION SPLICE PACKAGES USING INTERNAL HEAT SOURCES.
    Murata, N.
    Hoshino, M.
    Yamakawa, S.
    Electronics Letters, 1984, 20 (25-26): : 1025 - 1026
  • [48] METHOD FOR CHARGING SEALED SILVER-CADMIUM CURRENT SOURCES.
    Molotkova, E.N.
    Orlova, L.M.
    Soviet Electrical Engineering (English Translation of Elektrotekhnika), 1977, 48 (02): : 95 - 98
  • [49] INVESTIGATION OF ARBITRARILY SHAPED REGULAR WAVEGUIDES BY THE METHOD OF AUXILIARY SOURCES.
    Malakshinov, N.P.
    Smagin, A.S.
    Radio Engineering and Electronic Physics (English translation of Radiotekhnika i Elektronika), 1982, 27 (11): : 56 - 60
  • [50] Investigation of two negative hydrogen ion sources. Effect of the volume.
    Bruneteau, AM
    Courteille, C
    Leroy, R
    Bacal, M
    PRODUCTION AND NEUTRALIZATION OF NEGATIVE IONS AND BEAMS / PRODUCTION AND APPLICATION OF LIGHT NEGATIVE IONS, 1996, (380): : 261 - 271
12345