CRITICAL ENERGY FOR DAMAGE AT SILICON SURFACES BOMBARDED WITH LOW-ENERGY ARGON IONS.

被引：0
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作者：
Lang, B. [1 ]
Taoufik, A. [1 ]
机构：
[1] Univ Louis Pasteur, Lab de, Cristallographie, Strasbourg, Fr, Univ Louis Pasteur, Lab de Cristallographie, Strasbourg, Fr
来源：
Applied Physics A: Solids and Surfaces | 1986年 / A39卷 / 02期
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摘要：
22
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页码：95 / 99
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