CRITICAL ENERGY FOR DAMAGE AT SILICON SURFACES BOMBARDED WITH LOW-ENERGY ARGON IONS.

被引：0

作者：

Lang, B. ^{[1
]}

Taoufik, A. ^{[1
]}

机构：

[1] Univ Louis Pasteur, Lab de, Cristallographie, Strasbourg, Fr, Univ Louis Pasteur, Lab de Cristallographie, Strasbourg, Fr

来源：

Applied Physics A: Solids and Surfaces | 1986年 / A39卷 / 02期

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摘要：

引用

页码：95 / 99

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