Mechanisms of platinum sputtering by low-energy inert gas ions

被引：0

作者：

Kulikauskas, V.S. ^{[1
]}

Mashkova, E.S. ^{[1
]}

Molchanov, V.A. ^{[1
]}

Haidarov, A.A. ^{[1
]}

Chernysh, V.S. ^{[1
]}

Eckstein, W. ^{[1
]}

机构：

[1] M.V. Lomonosov Moscow State Univ, Moscow, Russia

来源：

Surface Investigation X-Ray, Synchrotron and Neutron Techniques | 2000年 / 15卷 / 04期

关键词：

Computer simulation - Inert gases - Ion bombardment - Platinum - Surfaces;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

The results of the experimental study and computer simulation of angular distributions of particles sputtered from polycrystalline platinum by the 3 keV He+ and 3.5 keV Ar+ bombardment at the normal ion incidence to the surface are presented. It has been established that angular distributions of sputtered particles are over-cosine and their shape is practically independent of the type of bombarding ions. The results of experiments have been found to agree well with the data of computer simulations. The role of different mechanisms in the formation of angular distributions of sputtered particles has been analyzed for the case of the low energy argon and helium ions bombardment of platinum.

引用

页码：621 / 629