Heteroepitaxy of SrTiO3 on vicinal Si(001): Growth and kinetic effects

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作者：
机构：
[1] Liang, Y.
[2] Wei, Y.
[3] Hu, X.M.
[4] Yu, Z.
[5] Droopad, R.
[6] Li, H.
[7] Moore, K.
来源：
Liang, Y. (yong.liang@motorola.com) | 1600年 / American Institute of Physics Inc.卷 / 96期
关键词：
Entropy - Heating - High energy electron diffraction - Hydrocarbons - Molecular beam epitaxy - Monolayers - Morphology - Oxidation - Partial pressure - Scanning tunneling microscopy - Thermocouples - Titanium oxides - X ray photoelectron spectroscopy;
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摘要：
The heteroepitaxy of SrTiO3 growth on a vicinal Si substrate by molecular beam epitaxy was investigated. The x-ray photoelectron spectroscopy (XPS), reflection-high-energy-electron diffraction (RHEED) and scanning tunneling microscopy (STM) were used to investigate the structural, chemical and morphological properties of the SrTiO3. It was found by STM that a well-defined step-terrace morphology was retained on the SrTiO3 film grown by codeposition on a vicinal Si(001) substrate. The results states that the kinetic effects and the presence of Sr promotes titanium oxidation by providing a different transition state with a lower Ti oxidation barrier.
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