Determination of elastic modulus and Poisson's ratio of diamond-like carbon films

被引：1
|
作者：
Cho, Sung-Jin [1 ,2 ]
Lee, Kwang-Ryeol [1 ]
Yong Eun, Kwang [1 ]
Hee Hahn, Jun [3 ]
Ko, Dae-Hong [2 ]
机构：
[1] Thin Film Technology Research Center, Korea Inst. Sci. Technol., P.O. B., Seoul, Korea, Republic of
[2] Department of Ceramic Engineering, Yonsei University, 120-701, Seoul, Korea, Republic of
[3] Materials Evaluation Center, Korea Res. Inst. Std. Sci., P.O. B., Taejon, Korea, Republic of
来源：
Thin Solid Films | 1999年 / 341卷 / 01期
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页码：207 / 210
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