Simultaneous three-dimensional step-height measurement and high-resolution tomographic imaging with a spectral interferometric microscope

被引：0
|
作者：
Mehta, Dalip Singh [1 ]
Sugai, Masaya [1 ]
Hinosugi, Hideki [1 ]
Saito, Shohei [1 ]
Takeda, Mitsuo [1 ]
Kurokawa, Takashi [1 ]
Takahashi, Hideki [1 ]
Ando, Masahito [1 ]
Shishido, Masataka [1 ]
Yoshizawa, Tetsuo [1 ]
机构：
[1] University of Electro-Communications, 1-5-1 Chofugaoka, Chofu, Tokyo 182-8585, Japan
来源：
Applied Optics | 2002年 / 41卷 / 19期
关键词：
Frequency-scanning devices - Superluminescent diodes (SLD);
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学科分类号：
摘要：
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页码：3874 / 3885
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