Preparation of Y-Ba-Cu-O films by dc sputtering

被引：0
|
作者：
Saito, Yukinori [1 ]
Sakabe, Kazuhiko [1 ]
Ishihara, Kazuhito [1 ]
Manaka, Koichi [1 ]
Suganomata, Shinji [1 ]
机构：
[1] Yamanashi Univ, Japan
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 1988年 / 27 pt 1卷 / 06期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
3
引用
收藏
页码：1103 / 1104
相关论文
共 50 条
  • [1] PREPARATION OF Y-BA-CU-O FILMS BY DC SPUTTERING
    SAITO, Y
    SAKABE, K
    ISHIHARA, K
    MANAKA, K
    SUGANOMATA, S
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1988, 27 (06): : 1103 - 1104
  • [2] HIGH-TC Y-BA-CU-O FILMS BY INSITU DC SPUTTERING
    RAMOS, J
    ZAREMBINSKI, S
    MATERIALS LETTERS, 1990, 9 (12) : 529 - 532
  • [3] Preparation of superconducting Y-Ba-Cu-O thin films by rf magnetron sputtering
    Huang, Zongtan
    Li, Guozhen
    Zeng, Guangli
    Huang, Jiangping
    Xiong, Guilan
    Vacuum, 1991, 42 (16)
  • [4] DC MAGNETRON SPUTTERING OF Y-BA-CU-O ON SI(100)
    RAVEN, MS
    ELECTRONICS LETTERS, 1988, 24 (06) : 341 - 343
  • [5] INSITU PREPARATION OF Y-BA-CU-O SUPERCONDUCTING THIN-FILMS BY MAGNETRON SPUTTERING
    LI, HC
    LINKER, G
    RATZEL, F
    SMITHEY, R
    GEERK, J
    APPLIED PHYSICS LETTERS, 1988, 52 (13) : 1098 - 1100
  • [6] PREPARATION OF Y-Ba-Cu-O THIN FILMS BY Rf-MAGNETRON SPUTTERING.
    Ohkuma, Haruo
    Mochiku, Takashi
    Kanke, Yoko
    Wen, Zhongmin
    Yokoyama, Shin
    Asano, Hajime
    Iguchi, Ienari
    Yamaka, Eiso
    Japanese Journal of Applied Physics, Part 2: Letters, 1987, 26 (09): : 1484 - 1486
  • [7] PREPARATION OF Y-BA-CU-O THIN-FILMS BY RF-MAGNETRON SPUTTERING
    OHKUMA, H
    MOCHIKU, T
    KANKE, Y
    WEN, ZM
    YOKOYAMA, S
    ASANO, H
    IGUCHI, I
    YAMAKA, E
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1987, 26 (09): : L1484 - L1486
  • [8] EFFECT OF SPUTTERING CURRENT ON THE GROWTH OF Y-BA-CU-O FILMS
    LIN, RJ
    APPLIED PHYSICS LETTERS, 1990, 56 (24) : 2451 - 2453
  • [9] SUPERCONDUCTING Y-BA-CU-O OXIDE-FILMS BY SPUTTERING
    HONG, M
    LIOU, SH
    KWO, J
    DAVIDSON, BA
    APPLIED PHYSICS LETTERS, 1987, 51 (09) : 694 - 696
  • [10] PREPARATION OF SUPERCONDUCTING FILMS OF THE Y-BA-CU-O COMPOSITION
    GIVARGIZOV, EI
    LYUBUTIN, IS
    PANKRASHOV, AI
    GUBKIN, MK
    SMIRNOVSKAYA, EM
    OBOLENSKAYA, LN
    VOLOBUEV, AA
    PISMA V ZHURNAL TEKHNICHESKOI FIZIKI, 1988, 14 (08): : 677 - 679
12345