VIA ETCHING OF CERAMIC GREEN SHEETS WITH EXCIMER LASER RADIATION.

被引:0
|
作者
Anon
机构
来源
IBM technical disclosure bulletin | 1985年 / 28卷 / 03期
关键词
D O I
暂无
中图分类号
学科分类号
摘要
引用
收藏
相关论文
共 50 条
  • [1] Chemical etching of silicon induced by excimer laser radiation
    Sesselmann, W.
    Chemtronics, 1989, 4 (03): : 135 - 140
  • [2] Etching of sapphire assisted by copper-vapour laser radiation.
    Dolgaev, SI
    Lyalin, AA
    Simakin, AV
    Shafeev, GA
    KVANTOVAYA ELEKTRONIKA, 1996, 23 (01): : 67 - 70
  • [3] Characteristics of plasma heating by short-wavelength excimer laser radiation.
    Faenov, AY
    Magunov, AI
    Pikuz, TA
    Skobelev, IY
    Pikus, SA
    Bollanti, S
    DiLazzaro, P
    Lisi, N
    Flora, F
    Letardi, T
    Palladine, L
    Reale, A
    Scafati, A
    Grilli, A
    Batani, D
    Mauri, A
    Osterheld, A
    Goldstein, W
    KVANTOVAYA ELEKTRONIKA, 1996, 23 (08): : 719 - 724
  • [4] Excimer laser etching
    Boatner, Lynn
    Longmire, Hu
    Rouleau, Christopher
    Gray, Allison
    ADVANCED MATERIALS & PROCESSES, 2008, 166 (04): : 39 - 39
  • [5] BLEACHING OF ZnTe:Li CRYSTALS BY GREEN LASER RADIATION.
    Radautsan, S.I.
    Gribkovskii, V.P.
    Tsurkan, A.E.
    Zimin, L.G.
    Verlan, V.I.
    Samuilova, N.K.
    Soviet Journal of Quantum Electronics (English translation of Kvantovaya Elektronika), 1976, 6 (11): : 1347 - 1348
  • [6] Excimer laser etching
    Boatner, Lynn A.
    Longmire, Hu
    Rouleau, Christopher
    Gray, Allison
    2008, ASM International, Materials Park, 9639 Kinsman Road, OH 44073-0002, United States (166):
  • [7] REMOVAL PROCESS OF CERAMIC MATERIALS WITH EXCIMER LASER-RADIATION
    TONSHOFF, HK
    GEDRAT, O
    HIGH POWER LASERS AND LASER MACHINING TECHNOLOGY, 1989, 1132 : 104 - 110
  • [8] CONDENSED CHLORINE ETCHING OF GAAS INDUCED BY EXCIMER LASER-RADIATION
    SHIH, MC
    FREILER, MB
    HAASE, G
    SCARMOZZINO, R
    OSGOOD, RM
    APPLIED PHYSICS LETTERS, 1992, 61 (07) : 828 - 830
  • [9] EXCIMER LASER ETCHING OF POLYMERS
    SRINIVASAN, V
    SMRTIC, MA
    BABU, SV
    JOURNAL OF APPLIED PHYSICS, 1986, 59 (11) : 3861 - 3867
  • [10] EXCIMER LASER ETCHING OF POLYIMIDE
    BRANNON, JH
    LANKARD, JR
    BAISE, AI
    BURNS, F
    KAUFMAN, J
    JOURNAL OF APPLIED PHYSICS, 1985, 58 (05) : 2036 - 2043