Microlithography using metastable helium atoms: Patterning of gold film coated with dodecanethiol self-assembled monolayers on mica

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[1] Ju, Xin
[2] Kurahashi, Mitsunori
[3] Suzuki, Taku
[4] Yamauchi, Yasushi
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Ju, X. | 1600年 / Japan Society of Applied Physics卷 / 42期
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