Nucleation and growth of platelet bubble structures in He implanted silicon

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作者：
Fichtner, P.F.P. [1 ]
Kaschny, J.R. [1 ]
Kling, A. [1 ]
Trinkaus, H. [1 ]
Yankov, R.A. [1 ]
Muecklich, A. [1 ]
Skorupa, W. [1 ]
Zawislak, F.C. [1 ]
Amaral, L. [1 ]
da Silva, M.F. [1 ]
Soares, J.C. [1 ]
机构：
[1] Universidade Federal do Rio Grande, do Sul, Porto Alegre, Brazil
来源：
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms | 1998年 / 136-138卷
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页码：460 / 464
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