Nucleation and growth of platelet bubble structures in He implanted silicon

被引：0

作者：

Fichtner, P.F.P. ^{[1
]}

Kaschny, J.R. ^{[1
]}

Kling, A. ^{[1
]}

Trinkaus, H. ^{[1
]}

Yankov, R.A. ^{[1
]}

Muecklich, A. ^{[1
]}

Skorupa, W. ^{[1
]}

Zawislak, F.C. ^{[1
]}

Amaral, L. ^{[1
]}

da Silva, M.F. ^{[1
]}

Soares, J.C. ^{[1
]}

机构：

[1] Universidade Federal do Rio Grande, do Sul, Porto Alegre, Brazil

来源：

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms | 1998年 / 136-138卷

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摘要：

引用

页码：460 / 464

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