LATTICE DESIGN CONSIDERATIONS FOR COMPACT STORAGE RINGS.

被引：0

作者：

Moser, Herbert O. ^{[1
]}

机构：

[1] Kernforschungszentrum Karlsruhe, Karlsruhe, West Ger, Kernforschungszentrum Karlsruhe, Karlsruhe, West Ger

来源：

Nuclear instruments and methods in physics research | 1987年 / A266卷 / 1-3期

关键词：

ELECTROMAGNETIC WAVES - LITHOGRAPHY - X-RAYS;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

The use of superconducting bending magnets in compact electron storage rings for generation of synchrotron radiation imposes additional design constraints caused by the nonlinear and non-isomagnetic field of the magnets. A symplectic third order beam optics calculation including real fields and chromatic effects is performed on the proposed Karlsruhe compact synchrotron light source for deep-etch X-ray lithography. The results show that satisfactory dynamic aperatures and beam sizes and divergences can be found. With the magnet design used, there remains even a certain flexibility to adapt the lattice to different lithographic requirements.

引用

页码：63 / 67