We present results for the temperature variation of diffusion coefficients for adatoms and vacancies on Ag(100), Cu(100), and Ni(100), using transition state theory and many-body interaction potentials from the embedded atom method. The contribution of lattice vibrations is found to be essential for the evaluation of the diffusion pre-exponential factors and is incorporated through the thermodynamic functions calculated in the harmonic/quasi-harmonic approximation. Our results show that mass transport on these surfaces can proceed via both vacancy and adatom migration, with a slight preference for the former in certain cases.