Determination of hydrogen in 6H-SiC epitaxial layers by the 15N nuclear reaction analysis technique

被引：0

作者：

Portmann, J. ^{[1
]}

Haug, C. ^{[1
]}

Brenn, R. ^{[1
]}

Schneider, J. ^{[2
]}

Rottner, K. ^{[3
]}

Helbig, R. ^{[3
]}

机构：

[1] Fac. of Phys. and Mat. Res. Center, Univ. Freiburg, Hermann-Herder-S., Freiburg, Germany

[2] Materials Research Center, University of Freiburg, D-79104, Freiburg, Germany

[3] Institute of Applied Physics, University Erlangen, D-91058, Erlangen, Germany

来源：

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms | 1999年 / 155卷 / 01期

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页码：132 / 136