APPLICATION OF GLOW DISCHARGE POLYMERIZATION FILMS FOR ELECTRONIC DEVICES.

被引：0

作者：

Kampfrath, Gerit

Hamann, Claus

机构：

来源：

Wissenschaftliche Zeitschrift - Technische Hochschule Karl-Marx-Stadt | 1986年 / 28卷 / 02期

关键词：

SEMICONDUCTOR DEVICES - Thin Films;

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摘要：

Glow discharge polymerization is an important technique to produce thin polymer films. These films have high density and are thermally stable and highly insulating. Very thin films can be deposited on any substrate. These and other properties promote the application of such films in passivating electronic devices. It is advantageous that the deposition be carried out at low temperatures. The devices can be bonded and soldered after film deposition.

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页码：232 / 237