Transmission lines and passive elements for multilayer coplanar circuits on silicon

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作者：
Univ of Ulm, Ulm, Germany [1 ]
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来源：
IEEE Trans Microwave Theory Tech | / 5 pt 2卷 / 616-622期
关键词：
Electric impedance - Electric losses - Low pass filters - Passive filters - Resonators - Semiconducting silicon - Substrates;
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摘要：
In this paper, propagation properties of both standard and multilayer coplanar lines on different types of silicon substrates, as well as a number of quasi-lumped and stub-type circuit elements, are investigated. For the transmission lines, emphasis is placed on losses. As examples for circuit elements, a lumped parallel resonator and a high-low impedance low-pass filter are demonstrated.
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