USE OF AMORPHOUS SILICON FILMS AS SENSORS.

被引：0
作者：
Koike, Ryutaro [1 ]
Kodato, Setsuo [1 ]
机构：
[1] Anritus Corp, Atsugi, Jpn, Anritus Corp, Atsugi, Jpn
来源：
Sensors and actuators | 1988年 / 13卷 / 01期
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摘要：
SENSORS
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页码：11 / 27
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