STUDY OF ELECTRICALLY ACTIVE DEFECTS IN SILICON WAFERS WITH THE SCANNING ELECTRON MICROSCOPE.

被引：0

作者：

Karelin, N.M.

Dusakin, S.I.

Litvinov, Yu.M.

Rau, E.I.

Spivak, G.V.

机构：

来源：

Soviet Microelectronics (English Translation of Mikroelektronika) | 1980年 / 9卷 / 01期

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Compendex;

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摘要：

SEMICONDUCTOR MATERIALS

引用

页码：26 / 30

共 12 条

[1] STUDYING BONE REGENERATION WITH THE SCANNING ELECTRON MICROSCOPE.
Draenert, K.
Scanning Electron Microscopy, 1983, v (pt 1) : 247 - 254
[2] Specimen Stage for Fatigue Tests in the Scanning Electron Microscope.
Kromp, Wolfgang
Weiss, Brigitte
Stickler, Roland
1600, (10):
[3] OBSERVATION OF HOT TEARS IN CAST STEEL BY SCANNING ELECTRON MICROSCOPE.
Kita, Kiyoshi
International cast metals journal, 1981, 6 (01): : 41 - 51
[4] Wear Behavior of Materials. Studies with the Scanning Electron Microscope.
Pohl, Michael
Buchard, Willy Guenther
Krause, Hans
Schroelkamp, Christian
Schmiertechnik + Tribologie, 1981, 28 (01): : 16 - 22
[5] CONCERNING THE FORMATION OF IMAGES OF DEEP HOLES IN A SCANNING ELECTRON MICROSCOPE.
Gorodskii, D.D.
Zadorozhnyi, S.S.
Luk'yanov, A.E.
Rau, E.I.
Spivak, G.V.
Moscow University Physics Bulletin (English Translation of Vestnik Moskovskogo Universiteta, Fizika), 1975, 30 (04): : 32 - 36
[6] EXAMINATION OF DEVICE DEPLETION LAYER MOVEMENT USING THE SCANNING ELECTRON MICROSCOPE.
Ranasinghe, D.W.
Cross, A.C.
Nuclear Instruments and Methods, 1980, : 501 - 511
[7] STUDY OF THE FINE STRUCTURE OF GRAPHITE INCLUSIONS IN GRAY CAST IRONS BY MEANS OF THE SCANNING ELECTRON MICROSCOPE.
Shebatinov, M.P.
Metal Science and Heat Treatment, 1974, 16 (3-4): : 288 - 293
[8] HIGH VOLTAGE ELECTRON MICROSCOPE STUDY OF DEFECTS IN SILICON.
Oshima, R.
Sadamitsu, S.
Fujita, F.E.
Physica B: Physics of Condensed Matter & C: Atomic, Molecular and Plasma Physics, Optics, 1982, 116 B&C (1-3): : 606 - 611
[9] COLONIZATION OF NEMATODE EGGS BY PAECILOMYCES LILACINUS (THOM) SAMSON AS OBSERVED WITH SCANNING ELECTRON MICROSCOPE.
Dunn, M.T.
Sayre, R.M.
Carrell, A.
Wergin, W.P.
Scanning Electron Microscopy, 1982, (pt 3) : 1351 - 1357
[10] Study of the Precipitation of Intermetallic Phases in Maraging Alloys with the Aid of an Electron Microscope.
Garbarz, Bogdan
Gorczyca, Stanislaw
Archiwum Hutnictwa, 1979, 24 (04): : 439 - 458

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