Fabrication and finite element analysis of piezoelectric thick-film micro-actuator for hard disk drives

被引：0
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作者：
Jing, Yang [1 ]
Luo, Jian-Bin [1 ]
Zhang, Xue-Heng [1 ]
Zhang, Li [1 ]
机构：
[1] Lab. of Tribology, Tsinghua Univ., Beijing 100084, China
来源：
Beijing Ligong Daxue Xuebao/Transaction of Beijing Institute of Technology | 2004年 / 24卷 / 12期
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摘要：
16
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页码：1045 / 1048
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