High-temperature hardness of bulk single-crystal AlN

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作者
Yonenaga, Ichiro [1 ]
Nikolaev, Andrey [2 ]
Melnik, Yuriy [3 ]
Dmitriev, Vladimir [3 ]
机构
[1] Institute for Materials Research, Tohoku University, 2-1-1 Katahira, Aoba-ku, Sendai 980-8577, Japan
[2] Ioffe Institute, Crystal Growth Research Center, St. Petersburg, 194 021, Russia
[3] TDI, Inc., Gaithersburg, MD 20877, United States
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Hydride vapor phase epitaxy (HVPE) - Mechanical stability;
D O I
10.1143/jjap.40.l426
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