Characterization of filtered cathodic vacuum arc system

被引：0
|
作者：
Shi, X. [1 ]
Tay, B.K. [1 ]
Flynn, D.I. [1 ]
Ye, Q. [1 ]
Sun, Z. [1 ]
机构：
[1] Nanyang Technological Univ, Singapore, Singapore
来源：
Surface and Coatings Technology | 1997年 / 94-95卷 / 1-3期
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学科分类号：
摘要：
Vacuum deposited coatings
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页码：195 / 200
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