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Heat treatment of cathodic arc deposited amorphous hard carbon films
被引：0
作者：
Anders, Simone
[1
]
Ager III, Joel W.
[1
]
Pharr, George M.
[1
]
Tsui, Ting Y.
[1
]
Brown, I.G.
[1
]
机构：
[1] Lawrence Berkeley Natl Lab, Berkeley, United States
来源：
Thin Solid Films
|
1997年
/
308-309卷
关键词：
Number:;
DE-AC03–76SF00098;
Acronym:;
-;
Sponsor:;
DE-AC05–760R00033;
DE-AC05–96OR222464;
USDOE;
Sponsor: U.S. Department of Energy;
ARO118–95;
ARO;
Sponsor: Army Research Office;
BES;
Sponsor: Basic Energy Sciences;
ORAU;
Sponsor: Oak Ridge Associated Universities;
8042–03;
EPRI;
Sponsor: Electric Power Research Institute;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：186 / 190
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