Grain matrix made with excimer-laser crystallization of thin silicon films

被引：0

作者：

Van Der Wilt, P.Ch. ^{[1
]}

Ishihara, R. ^{[1
]}

机构：

[1] Lab. Electron. Components, T., Delft Inst. Microlectron. S., Delft University of Technology, Feldmannweg 17, NL-2600 GB Delft, Netherlands

来源：

Solid State Phenomena | 1999年 / 67卷

关键词：

D O I：

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学科分类号：

摘要：

引用

页码：169 / 173

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[41] Phase field modeling of excimer laser crystallization of thin silicon films on amorphous substrates [J].

Shih, C. J. ;

Fang, C. H. ;

Lu, C. C. ;

Wang, M. H. ;

Lee, M. H. ;

Lan, C. W. .

JOURNAL OF APPLIED PHYSICS, 2006, 100 (05)

[42] EXCIMER-LASER REACTIVE ABLATION DEPOSITION OF SILICON-NITRIDE FILMS [J].

DANNA, E ;

LEGGIERI, G ;

LUCHES, A ;

MARTINO, M ;

PERRONE, A ;

MAJNI, G ;

MENGUCCI, P ;

ALEXANDRESCU, R ;

MIHAILESCU, IN ;

ZEMEK, J .

APPLIED SURFACE SCIENCE, 1995, 86 (1-4) :170-174

[43] Heterogeneous nucleation in excimer-laser melted Si thin-films [J].

Ishihara, R ;

Voogt, FC .

POLYCRYSTALLINE SEMICONDUCTORS IV MATERIALS, TECHNOLOGIES AND LARGE AREA ELECTRONICS, 2001, 80-81 :163-168

[44] Electrochemical and Raman-Scattering Characterizations of Defects in Polycrystalline Silicon Thin Films Formed by Excimer-Laser Annealing, Solid-Phase Crystallization, and Continuous-Wave Laser Lateral Crystallization [J].

Kitahara, Kuninori ;

Ohashi, Yasutaka ;

Yamamoto, Kenichi ;

Sasaki, Nobuo .

JAPANESE JOURNAL OF APPLIED PHYSICS, 2009, 48 (02)

[45] Light absorptive underlayer enhanced excimer-laser crystallization of Si thin-film [J].

Wenchang Yeh ;

Dunyuan Ke ;

Chunjun Zhuang ;

Hsiangen Huang ;

Yubang Yang .

Journal of Materials Research, 2007, 22 :2973-2981

[46] Excimer laser crystallization and doping of silicon films on plastic substrates [J].

Smith, PM ;

Carey, PG ;

Sigmon, TW .

APPLIED PHYSICS LETTERS, 1997, 70 (03) :342-344

[47] Light absorptive underlayer enhanced excimer-laser crystallization of Si thin-film [J].

Yeh, Wenchang ;

Ke, Dunyuan ;

Zhuang, Chunjun ;

Huang, Hsiangen ;

Yang, Yubang .

JOURNAL OF MATERIALS RESEARCH, 2007, 22 (11) :2973-2981

[48] Advanced excimer-laser crystallization process for single-crystalline thin film transistors [J].

Ishihara, R ;

van der Wilt, PC ;

van Dijk, BD ;

Burtsev, A ;

Metselaar, JW ;

Beenakker, CIM .

THIN SOLID FILMS, 2003, 427 (1-2) :77-85

[49] EXCIMER-LASER PROCESSING FOR SURFACE IMPROVEMENT OF TIN OXIDE THIN-FILMS [J].

GALINDO, H ;

VINCENT, AB ;

SANCHEZ, JC ;

LAUDE, LD .

JOURNAL OF APPLIED PHYSICS, 1993, 74 (01) :645-648

[50] Excimer laser-induced crystallization of CdSe thin films [J].

Shaffer, Etienne ;

Helmy, Amr S. ;

Drouin, Dominique ;

Dubowski, Jan J. .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2008, 93 (04) :869-874

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