Fully integrated surface micromachined magnetic microactuator with a multilevel meander magnetic core

被引：7

作者：

Ahn, Chong H. ^{[1
]}

Allen, Mark G. ^{[1
]}

机构：

[1] Georgia Inst of Technology, Atlanta, United States

来源：

Journal of Microelectromechanical Systems | 1993年 / 2卷 / 01期

基金：

美国国家科学基金会;

关键词：

Magnetic devices - Solenoids;

D O I：

10.1109/84.232590

中图分类号：

学科分类号：

摘要：

A fully integrated magnetic microactuator using surface micromachining techniques is presented. To achieve this device, low-resistance meander conductors located in a single plane were interwoven with multilevel meander magnetic cores. This 'wrapped' solenoid (with the core wrapped around the conductor) was fabricated in a fully integrated fashion. A magnetic microactuator was realized by incorporating a surface micromachined nickel-iron cantilever beam as part of the magnetic circuit of the core. The nickel-iron cantilever beam was 2.5 micrometers thick, 25 micrometers wide, and 780 micrometers long, and the magnetic circuit contained 17 turns of meander-type solenoid coils.

引用

页码：15 / 22