Dependence of measuring errors of rms roughness on stylus tip size for mechanical profilers

被引：0

作者：

Mendeleyev, Vladimir Ya ^{[1
]}

机构：

[1] Institute of High Temperatures, Russian Academy of Sciences, Izhorskaya 13/19, 127412 Moscow, Russia

来源：

Applied Optics | 1997年 / 36卷 / 34期

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摘要：

Tracing of a random profile with a mechanical profiler with a spherical tipped stylus has been investigated by means of computer simulation. It is shown that the fractional measuring errors of mis roughness depend on only the ratio of rms roughness CT to the stylus tip radius r and the ratio of rms roughness to the 1/e correlation length ρc. The ratios σ/r were in the range of 0.005-0.05 and the ratios σ-/ρcwere equal to 0.028 and 0.048. © 1997 Optical Society of America.

引用

页码：9005 / 9009

共 4 条

[1] Dependence of measuring errors of rms roughness on stylus tip size for mechanical profilers
Mendeleyev, VY
APPLIED OPTICS, 1997, 36 (34): : 9005 - 9009
[2] INFLUENCES OF THE STYLUS TIP GEOMETRY ON INDUSTRIAL ROUGHNESS MEASURING
BODSCHWINNA, H
TECHNISCHES MESSEN, 1980, 47 (01): : 21 - 28
[3] RESEARCH AND DEVELOPMENT IN THE FIELD OF ROUGHNESS MEASURING .2. TEST OF STYLUS TIP INSTRUMENTS
HILLMANN, W
TECHNISCHES MESSEN, 1980, 47 (06): : 209 - 218
[4] THE DEPENDENCE OF FRACTURE MECHANICAL AND FLUID-FLOW PROPERTIES ON FRACTURE ROUGHNESS AND SAMPLE-SIZE
TSANG, YW
WITHERSPOON, PA
JOURNAL OF GEOPHYSICAL RESEARCH, 1983, 88 (NB3): : 2359 - 2366

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