Laser tunning silicon microdevices for analog microelectronics

被引：0
|
作者：
École Polytechnique de Montréal, Département de Génie Physique, Case Postale 6079, succ. Centre-Ville, Montréal [1 ]
QC
H3C 3A7, Canada
不详 [2 ]
QC
H3C 3A7, Canada
不详 [3 ]
QC
H7V 4B4, Canada
机构：
来源：
Proc SPIE Int Soc Opt Eng | 1600年 / 205-207期
关键词：
Compendex;
D O I：
SPIE Regional Meeting on Optoelectronics, Photonics, and Imaging, Opto-Canada 2002
中图分类号：
学科分类号：
摘要：
Silicon - Iterative methods - Laser beams - Semiconductor junctions
引用
收藏
相关论文
共 50 条
  • [41] PURIFICATION AND IMPURITY DETECTION IN SILICON FOR MICROELECTRONICS
    DOMENICI, M
    MALINVERNI, P
    PEDROTTI, M
    JOURNAL OF CRYSTAL GROWTH, 1986, 75 (01) : 80 - 87
  • [42] Integration challenge of silicon photonics with microelectronics
    Paniccia, M
    Liu, AS
    Izhaky, N
    Barkai, A
    2005 2nd IEEE International Conference on Group IV Photonics, 2005, : 20 - 22
  • [43] How will physics be involved in silicon microelectronics
    Kamarinos, G
    Felix, P
    JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1996, 29 (03) : 487 - 500
  • [44] Silicon microelectronics - where are we going?
    Jakubowski, A.
    Elektronika, 1995, 36 (02):
  • [45] SILICON MICROELECTRONICS IN DEFENCE AND AEROSPACE.
    Chorley, Frank
    Systems Technology, 1981, (33): : 8 - 11
  • [46] MICROELECTRONICS - SILICON VALLEY COMES TO BELGIUM
    不详
    NATURE, 1984, 309 (5968) : 509 - 510
  • [47] Layering processes and their applications in silicon microelectronics
    Roy, PK
    Merchant, SM
    Nanda, AK
    BELL LABS TECHNICAL JOURNAL, 1997, 2 (02) : 234 - 245
  • [48] TRIODE CHARACTERISTICS AND VACUUM CONSIDERATIONS OF EVAPORATED SILICON MICRODEVICES
    ASLAM, M
    KLIMECKY, P
    MYERS, GP
    BUSTA, HH
    ZIMMERMAN, BJ
    ARTZ, BE
    CATHEY, LW
    ELDER, RE
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1993, 11 (02): : 422 - 425
  • [49] Polycrystalline silicon and silicon-germanium films for advanced microelectronics
    Lahiri, SK
    Das, S
    Umapathi, B
    Kal, S
    IETE JOURNAL OF RESEARCH, 1997, 43 (2-3) : 193 - 205
  • [50] Optical microdevices fabricated using femtosecond laser processing
    Otuka, Adriano J. G.
    Tomazio, Nathalia B.
    Tribuzi, Vinicius
    Ferreira, Paulo Henrique D.
    De Boni, Leonardo
    Mendonca, Cleber R.
    LASER 3D MANUFACTURING IV, 2017, 10095
12345